This is the internet page of the former teaching and research field Konstruktion und Entwicklung von Mikrosystemen (KEmikro) which was in action from 2004 until August 2021 at RWTH Aachen University. Research topics, references and the resume of Prof. Schomburg are still available over this page.
The equations required for the design of micro systems have been published in the book „Introduction to Microsystem Design“ . This book is helping both students and devolpers of micro systems in research and industry.